Delcom S3 非接觸式表面電阻量測
渦電流量測表面電阻(sheet resistance)的優勢
-非破壞性量測(非接觸式)
-可穿透絕緣層量測至導電層
-可即時量測移動中的樣品
-即時的品質監控檢查
-減少產品損害問題以及降低人工成本
-不破壞待測物表面
-解決鍍層產生的問題
-量測速度較四點探針提升
-避免使用到不合格的材料
-小型的手持型單面量測頭,可應用於較厚或是曲面材料量測
-適用於較大面積的或是已製程的導電材料, 例如:面板,窗戶,玻璃(Low-E)等...
-可量測表面電導, 表面電阻, 材料厚度(在已知電阻率的條件下),以及電阻率(在已知厚度的條件下)
-透過LCD,軟體,瀏覽器或PC的應用程式來讀取數據
-體積小且單點量測的分離式探頭
-簡單的一鍵操作量測
-軟體包含自動樣品量測, 讀取, 記錄, 手動mapping, 判定pass/fail並導出到.CSV檔和Microsoft Excel
-使用Modbus或是網路方式來遠距讀取以及探頭控制
-可自行更換探頭來調整量測範圍
-可透過軟體同時監控八組量測頭
-全自動溫度補償
碳化矽(SiC),玻璃,晶圓,薄膜,觸控螢幕,平面顯示器,ITO,TCOs,奈米碳管(carbon nanotube),石墨烯(graphene),奈米銀絲(silver nanowire),半導體材光電材料,建築用玻璃(Low-E),智能玻璃(smart glass),OLED,LED,應用包裝/裝飾薄膜(紙),金屬標籤,微波接收器,反射材料,軟性電路,軟性電路板,金屬薄膜電容器,低可偵測技術(Low observables),電池和燃料電池,天線應用,防靜電薄膜等應用...
Model | S3 probe | ||||||||||||||||||||||||||||||||||||||||||||||
Minimum sample size | 3 cm diameter circle | ||||||||||||||||||||||||||||||||||||||||||||||
Spatial resolution | 3 cm diameter circle | ||||||||||||||||||||||||||||||||||||||||||||||
Reading rate | 30 ms | ||||||||||||||||||||||||||||||||||||||||||||||
Reading display rate | 240 ms (displays the average of eight readings) | ||||||||||||||||||||||||||||||||||||||||||||||
Model | 873 meter | ||||||||||||||||||||||||||||||||||||||||||||||
Range | ×10 From 5 to 100,000 ohms/square ×1 From .5 to 10,000 ohms/square ÷10 From .05 to 1,000 ohms/square ÷100 From .005 to 100 ohms/square | ||||||||||||||||||||||||||||||||||||||||||||||
Accuracy | Instruments are calibrated to better than 99.9% accuracy against National Institute of Standards and Technology (NIST) standards. User can calibrate a meter with one standard in one minute. | ||||||||||||||||||||||||||||||||||||||||||||||
Resolution |
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Linearity | Delcom guarantees no more than 3% deviation from the true sheet resistance value of tested material. The chart below shows a Delcom meter tested against 10 NIST, VLSI, and MSA standards. | ||||||||||||||||||||||||||||||||||||||||||||||
Repeatability | The Delcom meter readings are effectively 99.9% repeatable if sample placement and environmental factors, such as temperature, are held constant. | ||||||||||||||||||||||||||||||||||||||||||||||